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Information × Registration Number 0210U005233, 0109U004406 , R & D reports Title Study of doping characteristics of hard planar sources of the boron and phosphorus, developed on thermostats silicon substrate popup.stage_title Head Ostrovskii Igor Petrovich, Registration Date 19-08-2010 Organization Lviv Polytechnic National University popup.description2 Peculiarities of solid planar sources (SPS) of boron and phosphor elaboration on thermostable substrates have been discussed. The main parameters of SPS were investigated: exploiment duration, doping properties. By use of experimental samples of boron and phosphor SPS an improvement of technological parameters of silicon wafer doping processes was achieved. Product Description popup.authors Богдановський Юрій Миколайович Мищишин Володимир Михайлович popup.nrat_date 2020-04-02 Close
R & D report
Study of doping characteristics of hard planar sources of the boron and phosphorus, developed on thermostats silicon substrate
Head: Ostrovskii Igor Petrovich. Study of doping characteristics of hard planar sources of the boron and phosphorus, developed on thermostats silicon substrate. (popup.stage: ). Lviv Polytechnic National University. № 0210U005233
1 documents found

Updated: 2026-03-21


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