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Information × Registration Number 0210U007779, 0108U008347 , R & D reports Title Creation and research of linear measures for a nanometre range popup.stage_title Head Kupko Volodymyr, Registration Date 09-12-2010 Organization National scientific centre "Institute of Metrology" popup.description2 The current state and problems of creating measures of length for the nanometer range, features and possibilities of control (measurement) of parameters. Outlines the general requirements regarding the necessary measures nanometer length and the basic provisions of their verification methodology. Taking into account the existing capacity, domestic technology, defines the requirements for the manufacture of experimental samples of the measures on which the specification is designed to measure the relief of nanometer range based on single-crystal silicon, held support fabrication of experimental samples of measures and a draft specification. Investigations of the main metrological characteristics of experimental samples, measures probe microscopy techniques and methods of interferometry. Product Description popup.authors Ковшов Сергій Борисович Косенко Олег Олександрович Лукін Ігор Васильович popup.nrat_date 2020-04-02 Close