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Information × Registration Number 0211U001323, 0109U001867 , R & D reports Title Design and creation high-frequency solid body beam deflexion on the basis of processing technique МЕМS for systems of laser surgery and therapy. popup.stage_title Head Zhujkov J. Valerij, Registration Date 31-01-2011 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Design is directed on research of processing technique and characteristics actuators on the basis of solid-state electromechanical systems. The mathematical model of a solid-state electromechanical element with drive of fluctuations in a layer piezoelectric a substance is developed. The technological route of manufacturing of thin-film nitride of aluminium on the basis of a method jet dc sputtering is developed. Researches of ways inclusion of resonant elements beam deflexion. Management of mechanical characteristics of resonant elements. Designs composit piezoelectric resonators are offered and analysed. Significant movings with the big speed are received. Designs piezoelectric high-frequency film elements of beam deflexion have the smaller sizes, wider band of operating frequencies and smaller cost. Results are recommended for using by design of solid-state resonators and actuators microelectromechanical systems. Product Description popup.authors Іващук Анатолій Васильович Богдан Олександр Володимирович Богдан Тетяна Зіновіївна Зеленська Марина Олександрівна Зеленський Сергій Васильович Коваль Вікторія Михайлівна Петергеря Юлія Сергіївна Петрищев Олег Миколайович Пономарьова Тетяна Миколаївна Радченко Олексій Леонідович Селіванов Сергій Олександрович Терещенко Тетяна Олександрівна Чугаєв Андрій Петрович popup.nrat_date 2020-04-02 Close