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Information × Registration Number 0211U001350, 0110U005894 , R & D reports Title Optical and X-Ray investigations of phase composition of coverages are from an diamond-like and nanocomposite structure popup.stage_title Head Strelchuk Viktor Vasylyovych, Доктор фізико-математичних наук Registration Date 31-01-2011 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 Nanocomposite titanium-containing (n-TiC/a-C) thin film coatings obtained by magnetron sputtering and diamond-like carbon DLC-coatings deposited by hybrid laser-plasma method were investigated using high-resolution X-ray diffraction and micro-Raman spectroscopy. Raman spectra are obtained with submicron spatial resolution and phase composition sp2/sp3 is analyzed for investigated structures. Composition and characteristic sizes of microcrystal grains were determined, and elastic strains were estimated for the investigated coatings. For the investigated TiC films carbon was figure out to be in highly disordered state mainly in sp2 atomic configuration. Observed weak Raman signal corresponding to TiC vibrations indicates some violation of structural stoichiometry of TiC film in the investigated coatings. From analysis of Raman spectra shape for the investigated СNx and TiCNx films, formation of highly-disordered graphite-like clusters was found. Estimation of characteristic size of cluster gives values ~25 nm for СNx films and ~ 15 nm for TiCNx films. Observed Raman signal at 2220 см-1 evidences the formation of triple C?N chemical bonds with sp1 hybridization. Result of Raman study of diamond-like amorphous carbon films evidence the formation of iron oxide ?-Fe2O3 film on the surface of the investigated coatings and absence of amorphous carbon clusters in the investigated structures. From analysis of X-ray diffraction pattern of the investigated ТіС films, presence of cubic phase of titanium carbide with average lattice constant of ~ 0.43 nm is found. From quantitative analysis of cubic TiC phase it was shown that sizes of coherent scattering volume and of lattice microinhomogeneities have isotropic behavior, when average lattice strains linearly increase with grain sizes. Results of X-ray analysis of investigated carbon CNx films carried out in sliding geometry of diffraction evidence the amorphous state of CNx layers of the investigated structures. Product Description popup.authors Авраменко Катерина Андріївна Брикса Вадим Петрович Кладько Василь Петрович Коломис Олександр Федорович Кучук Адріан Володимирович Ніколенко Андрій Сергійович popup.nrat_date 2020-04-02 Close
R & D report
Head: Strelchuk Viktor Vasylyovych. Optical and X-Ray investigations of phase composition of coverages are from an diamond-like and nanocomposite structure. (popup.stage: ). Institute of Semiconductor Physics of National Academy of Sciences of Ukrain. № 0211U001350
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Updated: 2026-03-26