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Information × Registration Number 0211U005247, 0110U005752 , R & D reports Title The developed plasmodynamic system for precision synthesis of nanoscale metal films and their binary compounds. popup.stage_title Head Goncharov Alexey Antonovich, Registration Date 12-03-2011 Organization Institute of physics NASU popup.description2 It is adapted three experimental laboratory setups for demands of the project. The design of new gas leakage system is developed. Are executed a test sputtering of nanolayers of titan dioxides. On base of test layers it is made curve of dependence of film thickness on sputtering time for two modifications of magnetron type sources. Direct proportionality of layer thickness from sputtering time in the necessary range of films thickness with different growth rate is established: 5 nanometers/min for cylindrical magnetron and 0,67 nanometers/min for a planar source with an anode layer. Existence of dependence of a refraction index from nanolayer thickness for titan dioxides films is established. The received results allow to continue performance of the project and to turn out in the further scientifically-technological base for development of highly effective ionic-plasma arrangements of new generation for synthesis nanofilms of metals and their chemical compounds, including, managements their nanostucture and porosity. Product Description popup.authors Євсюков Антон Миколайович Гончаров Олексій Антонович Добровольський Андрій Миколайович Костін Євген Георгійович Проценко Іван Макарович Стеценко Борис Володимирович Фролова Олена Констянтинівна Щуренко Анатолія Іванівна popup.nrat_date 2020-04-02 Close