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Information × Registration Number 0211U006142, 0109U001453 , R & D reports Title Development of multicomponent multifunctional coatings and deposition methods of such coatings on the surfaces with precision machining popup.stage_title Head Tseluyko Olexandr Fedorovich, Registration Date 23-02-2011 Organization Kharkov National University named after V.N. Karazin popup.description2 The object of investigation is multicomponent multifunctional coatings and methods of their precision deposition on surfaces. The aim is development of multicomponent multifunctional coatings and methods of their precision deposition on surfaces. The method of investigation is experimental analysis of influence of magnetron, ark, ion-beam, surface-wave technological systems on coatings parameters. Physical processes simulation of coatings forming on PC. It is described two mode pulse magnetron-ark system with raised deposition velocity, heightened target using and improved mechanical and adhesive coatings characteristics; magnetron system of raised power density with sectional anode and addition anode transverse magnetic field for prevention of falling in ark mode; ion-beam sputtering system with controlled angle of ion incidence on a target and autocompensation of beam volume charge. Basing on computer simulation of temperature distribution in a film formed under pulse deposition at power density 0.5 10 W/cm2 it was suggested the method of calculation of technological regimes of deposition on low-sized volume produces. It allows making qualitative films with the thickness up to 5 nm with the deposition velocity 8 10 nm/min. It was worked out the technology of plasma-stimulated deposition of diamond-like coatings with the thickness of 70 400 nm and microhardness of 16 17 GPа at deposition velocity of 240 400 nm/hour of SiО2 films on side face of small-sized semiconductor X-ray detectors (for increasing of detector resistance from 1010 up to 6 1011 and raising of time stability) and small-sized containers of local radiotherapy of human malignant tumor for decreasing of radioactive contamination down to 630 Bq. It were investigated the factors influenced on erosion of tungsten and carbon divertor plate of fusion reactor at particle flow of 1014 1015 cm-2sec-1. Together with physical sputtering it was cleared chemical sputtering of carbon and emission of carbon atoms and deuterium ones from the surface. The morphology evolution of the surface is investigated at computer simulation using 1D and 2D codes SDTrimSP and SDTrimSP-2D. It was obtained the good agreement between the experimental data and the results of computer simulation. It was identified a number of local micro-processes which can not been cleared in the present time by experimental diagnostic. The equipment and coatings deposition technology could be the base for development of correspondent coatings deposition technology in manufacturing of high-precision mechanism units, which are in considerable level describe the common level and production competitiveness in such fields like mechanical engineering, instrument making etc. Product Description popup.authors Бізюков І. Бізюков О. Рябчиков Д. Середа І. Целуйко О. Чунадра А. popup.nrat_date 2020-04-02 Close