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Information × Registration Number 0211U007035, 0109U000294 , R & D reports Title Theoretical and experimental researches of methods ion-plasma forming of nanostructure for electronics popup.stage_title Head Tolok Volodymyr Tarasovych, Registration Date 18-03-2011 Organization Scientific Center of Physical Technologies popup.description2 It is received nanostructure from carbon plasma. The complex system of diagnostics and management of process ionic-beam sedimentation for the purpose of optimization of parameters technology of reception nanodimensional nitride and oxynitride films and nanogeterostructure is created. Influence of parameters of ionic-beam synthesis on a chemical condition and diffusive properties nitride and oxynitride films nanodimensional and division borders nanogeterostructure is defined a thickness. Product Description popup.authors Бєляєва Тамара Миколаївна Дудіна Наталія Григорівна Кропотов Олександр Юрійович Мірошниченко Григорій Олександрович Сребнюк Павло Анатолійович Удовицький Віктор Григорович Шухов Віктор Володимирович popup.nrat_date 2020-04-02 Close