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Information × Registration Number 0212U000619, 0110U004738 , R & D reports Title Development of the certificated mass-spectroscopy methods for nano-material, nano-srtucter and amorphous alloy diagnostics popup.stage_title Head Romanyuk Borys Mikolayovich, Доктор фізико-математичних наук Registration Date 02-03-2012 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 The mass-spectometry methods for the measurements of impurity depth distribution in GaN, GaAs, GaAlAs, SiGe, and thin Ni/Al layers (in their dependence on the targer type, thickness of the layers, etc.) providing nanometer depth resolution were developed. The investigations os the depth profiles of impurities implanted into Si wafers were performed. The method for mass-spectrometry measurements calibration for quantitive analysis was developed. Product Description popup.authors Мельник В.П. Мусаєв С.М. Оберемок О.С. Попов В.Г. Романюк Б.М. Хацевич І.М. popup.nrat_date 2020-04-02 Close