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Information × Registration Number 0212U001527, 0110U006408 , R & D reports Title Study of the process obtanning silicon high purity by plasma chemical recovering cleaned silane in low-temperature plasma of atomic hydrogen. popup.stage_title Head Shirokov Boris Mikhajlovich, Доктор технічних наук Registration Date 09-02-2012 Organization National Science Center "Kharkiv Institute of Physics and Technology popup.description2 By means of the designed and made gauges of a current and pressure on high-fregnence inductor the generator, inductor-plasma of-system Fulfera of molecular hydrogen the power balance is measured in plasma HF discharge. Product Description popup.authors Дериземля Анатолій Миколайович Кришталь Петро Григорович Радченко Володимир Іванович Семенов Микола Олександрович Швець Олег Михайлович Широков Борис Михайлович Щербакова Валентина Володимирівна popup.nrat_date 2020-04-02 Close
R & D report
Study of the process obtanning silicon high purity by plasma chemical recovering cleaned silane in low-temperature plasma of atomic hydrogen.
Head: Shirokov Boris Mikhajlovich. Study of the process obtanning silicon high purity by plasma chemical recovering cleaned silane in low-temperature plasma of atomic hydrogen.. (popup.stage: ). National Science Center "Kharkiv Institute of Physics and Technology. № 0212U001527
1 documents found

Updated: 2026-03-26


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