1 documents found
Information × Registration Number 0212U001977, 0112U005381 , R & D reports Title The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy popup.stage_title Head Slipchenko Nikolai, Registration Date 16-11-2012 Organization Kharkiv National University of Radioelectronics popup.description2 The analysis of the status and prospects of scanning probe modify technology of the objects of nanoelectronics are carried out. Are substantiated physical and theoretical aspects of the study of high local thermal effects of microwave probes. Numerical investigations of temperature establishing at the system microwave probe-semiconductor object using the existing methods for solving the electrodynamic and thermal problems are carried out. The algorithms of the space-time temperature distribution of conditions similar of technology process of semiconductor doping are developed.5481 Product Description popup.authors Бондаренко І.М. Гордієнко Ю.О. popup.nrat_date 2020-04-02 Close
R & D report
The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy
Head: Slipchenko Nikolai. The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy. (popup.stage: ). Kharkiv National University of Radioelectronics. № 0212U001977
1 documents found

Updated: 2026-03-25


Роздрукувати цю сторінку