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Information × Registration Number 0212U006263, 0110U005752 , R & D reports Title The developed plasmodynamic system for precision synthesis of nanoscale metal films and their binary compounds. popup.stage_title Head Goncharov Alexey Antonovich, Registration Date 12-03-2012 Organization Institute of physics NASU popup.description2 The nanolayers of of titanium dioxide in different phase are obtained. The parameters defining the different phases deposition of titanium dioxide in a cylindrical magnetron dc discharge are established. The control parameters allow to keep the synthesis of stoichiometric coatings in real time at a given operating point are shown. It is shown experimentally the effect of lining temperature on the formation of layers of different phases. Anatase nanolayers were obtained with a better photocatalytic activity than the layers obtained by chemical methods. With Raman spectroscopy it is shown existance of polycrystal phase of anatase in deposited films. Product Description popup.authors Гончаров Олексій Антонович Добровольський Андрій Миколайович Костін Євген Георгійович Проценко Іван Макарович Стеценко Борис Володимирович Фролова Олена Констянтинівна Щуренко Анатолія Іванівна popup.nrat_date 2020-04-02 Close