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Information × Registration Number 0212U006897, 0111U006176 , R & D reports Title Investigation of electro-physical, mechanical, thermal and optical properties of semiconductors, semiconductor and metallic films popup.stage_title Head Tulupenko Victor N., Registration Date 21-08-2012 Organization Donbass State Engineering Academy popup.description2 Object of research -- Phase formation and growth kinetics of films related to the influence of external factors. The objective is to solve the problem of establishing the processes forming the structure, composition and properties of thin film coatings formed in the systems of V-B-N and Ta-B-N depending on the dispersion and composition of working gas and optimization of these conditions to obtain films with desired physical and mechanical properties and recommendations for their practical use. The subject of study - the influence of sputtering and condensation on characteristics of growth, physical and mechanical properties of borides films and borodnitrydiv vanadium and tantalum synthesized reactive and not reactive RF magnetron sputtering targets and VB2 TaV2. Of Research - The paper uses a set of experimental and theoretical methods. Theoretical and practical results briefly grounded principles and approach to building a mechanism that describes the transfer of atoms, which is sprayed on the target surface to the substrate surface, which would enable to computer simulation of this process by Monte Carlo. Investigated the most characteristic morphological feature of forming transition metal diboride films are synthesized PVD-methods of texture growth plane (001). Novelty - a result of integrated theoretical studies, an optimal range of deposition conditions on mass transfer. Displaying the most characteristic morphological features of structure formation of film coatings dyborydov transition metals. Established that the transition from state to nano cluster leads to the formation dostehyometrychnyh films. Scope - Research and development on natural sciences and engineering. Product Description popup.authors Акімов Володимир Ігорович Білих Валерій Георгійович Богданова Татьяна Леонідівна Будніков Єгор Юрійович Демедюк Роман Олександрович Дмитриченко Татьяна Вікторівна Костенко Володимир Михайлович Масич Віталій Васильович Огньотова Жанна Миколаївна Петухов Вадим Вікторович Соломіна Вікторія Федорівна Тишкевич Анатолій Володимирович Тулупенко Віктор Миколайович Тютюнник Антон Михайлович Фоміна Оксана Сергіївна popup.nrat_date 2020-04-02 Close
R & D report
Head: Tulupenko Victor N.. Investigation of electro-physical, mechanical, thermal and optical properties of semiconductors, semiconductor and metallic films. (popup.stage: ). Donbass State Engineering Academy. № 0212U006897
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Updated: 2026-03-23