1 documents found
Information × Registration Number 0213U000606, 0112U005381 , R & D reports Title The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy popup.stage_title Head Slipchenko Nikolai, Registration Date 26-02-2013 Organization Kharkov National University of radioelectronics popup.description2 The analysis of the status and prospects of scanning probe modify technology of the objects of nanoelectronics are carried out. Are substantiated physical and theoretical aspects of the study of highlocal thermal effects of microwave probes. Numerical investigations of temperature establishing at the system microwave probe-semiconductor object using the existing methods for solving the electrodynamic and thermal problems are carried out. The algorithms of the space-time temperature distribution of conditions similar of technology process of semiconductor doping are developed. Product Description popup.authors Бондаренко І.М. Бородін О.В. Васильєв Ю.С. Власенко Л.О. Галич О.В. Гордієнко Ю.О. Григорьєв Е.В. Гуд Ю.І. Задніпровська Л.П. Карнаушенко В.П. Мельник С.І. Поліщук О.В. Полетаєв Д.О. Проказа О.М. Сергеєв П.Ю. Старостенко В.В. Таран Е.П. Троїцький С.І. popup.nrat_date 2020-04-02 Close
R & D report
The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy
Head: Slipchenko Nikolai. The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy. (popup.stage: ). Kharkov National University of radioelectronics. № 0213U000606
1 documents found

Updated: 2026-03-24


Роздрукувати цю сторінку