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Information × Registration Number 0213U001709, 0111U001463 , R & D reports Title Reactive ion-plasma synthesis of functional nanocomposite coatings in cluster plasma-technology system popup.stage_title Head Farenik Volodimir, Registration Date 24-01-2013 Organization Kharkov National University named after V.N. Karazin popup.description2 Object of study: prototype multifunctional cluster ion-plasma system with parameters corresponding to industrial application. Objective: Development of new generation of technologies of reactive ion-plasma synthesis of multi-functional coatings including nano-composites and structures. Research method: measurements of the magnetron discharge parameters and energy flow analysis of charged particles. The results of design, development and testing of prototype multifunctional cluster ion-plasma system, which is intended to deposition and processing of complex coatings including nano-composites and structures are presents in the report. The originality of created cluster system is the combination in a vacuum plasma system some compatible sources of flows of metals, ions, reactive species for sequential or simultaneous processing of complex micro-and nano-structures. All plasma units of cluster ion-plasma system can be operated separately or simultaneously when depositing complex composite coatings such as TiN, AlN,. ZrN, TiO2, Al2O3, ZrO2 and their combinations in multi-layer structures and nano-composites. Product Description popup.authors Дахов О. Дудін С. Зиков О. Лісовський В. Плетньов В. Фареник В. Юнаков М. Яковін С. popup.nrat_date 2020-04-02 Close