Search academic texts

Information × Registration Number 0213U002173, 0112U005305 , R & D reports Title Development of nanotechnologies of molecular radial epitaxy and concentrated ionic beams for their use in the production of nanotechnology complex "NanoFAB" (the second stage) popup.stage_title Head Galstjan George, Registration Date 16-01-2013 Organization Public Joint-stock Company "Scientific and industrial concern "Nauka" popup.description2 The functional scheme of focused ion beams chamber (FIBC) of nanotech complex "NanoFab" has been developed. The dummies of device on the base of two-coordinate piezo- drive and the manipulator have been fabricated using calculations of the samples positioning device and the samples transportation manipulator for FIBC module. The laboratory bench for testing FIBC parameters has been designed. The coordinate-linked precision positioning system in FIBC modules and scanning probe microscopy (SPM) has been developed. The conducted checkouts of silicon wafers modification under a pattern in the chamber FIBC, its transportation into SPM analytical chamber and research of modified sections by probe techniques (contact and semicontact atomic force microscopy techniques) as well as complex tests by four high vacuum modules of nanotech system have been successful. The technological procedures on FIBC module preparation for operation and ion source FIBC column separately, pumping and annealing FIBC module, replace ion source have been developed and elaborated. Product Description popup.authors Євсюков А.М. Євтух А.А. Анікеєв В.В. Білоголовський М.О. Бонковський Е.Л. Ворона С.П. Джежеря Ю.І. Журавльов Б.Х. Круковський С.І. Лєпєєва Ю.В. Лаунець В.Л. Луценко Г.В. Мазанко В.Ф. Мартинюк І.Д. Мовчан Д.М. Мрихін І.О. Новіков Є.І. Подолян О.М. Сірош В.О. Сидорченко І.М. Скоблік О.П. Філатов С.А. Філатова В.С. Шатернік В.Є. popup.nrat_date 2020-04-02 Close