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Information × Registration Number 0213U003092, 0110U004738 , R & D reports Title Development of the certificated mass-spectroscopy methods for nano-material, nano-srtuctures and amorphous alloy diagnostics popup.stage_title Head Romanyuk Borys Mikolayovich, Доктор фізико-математичних наук Registration Date 23-01-2013 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 Metrological attestation of the mass-spectroscopy equipment for mass-spectroscopy diagnostics of nano-materials, nano-structures and amorphous alloys have been developed. It was shown that it is necessary to provide the neutralization of electic charge at investigation of dielectric materials. The method of high-frequency sputtering of dielectric matrices was developed. Investigations of the surface structure and morphology of the experimental samples depending on sputtering conditions were done, and optimum conditions for analitical measurements were determined. Influence of the surface morphology on the measurement errors was investigated for determination of impurity content in dielectric matrices. It was shown that investigation of the post-ionized neutral particles mass-spectra gives advantages for surface analisis. Impurity distribution in dielectric films on Si substrates was measured by the methods of SIMS and SNMS. Product Description popup.authors Мельник В.П. Мусаєв С.М. Оберемок О.С. Попов В.Г. Романюк Б.М. Хацевич І.М. popup.nrat_date 2020-04-02 Close