Search academic texts

Registration Number

0213U004553, 0112U000894 , R & D reports

Title

Elaboration and investigation of gas discharge equipment for pulse electron-beam evaporation and ion-plasma deposition of nanostructorized coatings

popup.stage_title

Head

Denbnovetskiy Stanislav V.,

Registration Date

16-12-2013

Organization

Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI"

popup.description2

Analyze of properties of high voltage glow discharge and vacuum arc discharge is provided and the particularities of designing on the base of these discharges of technological equipment for pulse electron-beam evaporation and ion-plasma deposition of coatings in controlled by the pressure and the component including gas media are defined. With taking into account defined particularities of technological process of pulse ion-plasma coatings' deposition, gas discharge electron beam complex, included 10 kW glow discharge electron gun, vacuum arc ionizer and system of automatic control of energetic and time parameters of glow discharge electron gun, have been elaborated. Elaborated gas discharge complex provided the possibility of pulse ion-plasma coatings deposition in the range of parameters, corresponded to the requirements of technology of deposition the coatings by pulse electron beam evaporation.

Product Description

popup.authors

Кузьмичев Анатолій Іванович
Мельник Ігор Віталійович
Мельник Віталій Гнатович
Тугай Борис Андрійович
Тугай Сергій Борисович