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Information × Registration Number 0213U004607, 0113U000832 , R & D reports Title "Development of the technology for production of the holographic diffraction gratings based on inorganic vacuum photoresists" popup.stage_title Head Indutnyi Ivan, Доктор фізико-математичних наук Registration Date 18-12-2013 Organization V.Laskaryov Institute of Semiconductor Physics NAS of Ukraine popup.description2 The equipment have been designed and manufactured and optical scheme have been assembled to implement technology of holographic diffraction gratings production based on chalcogenide photoresist. The optimization of technological processes of chalcogenide photoresist depjsition, and the conditions of exposure and postexposure processing have been made. Based on the optimized technical process the experimental samples of the diffraction gratings have been produced and their characteristics were investigated. It was established that the characteristics of produced under this project experimental samples of the holographic diffraction gratings to meet the specifications and HRT 3-6128-86. The technological instructions for the implementation of the process of holographic diffraction gratings production using inorganic chalcogenide photoresist have been developed. Product Description popup.authors Данько Віктор Андрійович Жовмір Сергій Сергійович Луканюк Марія Василівна Минько Віктор Іванович Михайловська Катерина Василівна Сопінський Микола Вікторович Шепелявий Петро Євгенович popup.nrat_date 2020-04-02 Close