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Information × Registration Number 0213U005861, 0113U004331 , R & D reports Title The formation of micro-and nano-metals with a narrow size distribution and shape of the structural bits and pieces popup.stage_title Head Perekrestov V, Registration Date 23-08-2013 Organization Sumy State University popup.description2 Membranes were obtained anode-oxidized aluminum, which are ordered nanoscale pores. It used two stages of anodic oxidation for nanomembran formation. Studied using SEM structural and morphological properties of membranes showed that they have high homogeneity. The technology of formation of ordered nanoislands of Zn in its condensation on silicon under conditions close to thermodynamic equilibrium is perfected. A system that generates narrowly directed flow of sputtered atoms of zinc for condensation of zinc inside the pores is developed . It was also used temperature gradient in the thickness direction membranes, thus more effectively condense inside of the pores. The dependence of the mean free path of sputtered atoms from the pressure of the working gas is analyzed. It is shown that as a criterion closer to the thermodynamic equilibrium in the system plasma-condensate can be used relative supersaturation precipitable vapor. Thus for the system to use plasma condensation effective desorption energy. The research structure of nanoislands by SEM confirmed a planned result. Established the following optimal process parameters a naosystem zinc, as the pressure of the working gas, the temperature of the heater and cooler, power magnetron spray.5481 Product Description popup.authors Корнющенко Ганна Сергіївна Космінська Юлія Олександрівна Латишев Віталій Михайлович Наталіч Вікторія Володимирівна popup.nrat_date 2020-04-02 Close