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Information × Registration Number 0214U000971, 0114U003986 , R & D reports Title Creation of automated systems of control parameters of semiconductors popup.stage_title Head Oksanich Anatoly Petrovich, Registration Date 02-12-2014 Organization Kremenchuk Mykhaylo Ostrogradskiy State University popup.description2 The results of the research is to develop improved methods and automated complex definition of complex forms of deformation of semiconductor wafers and structures. The novelty of the method is to reduce measurement errors due to the use of noncontact measurement methods. Scope. The method is recommended for use in enterprises of electronic industry, engaged in the production of ingots of single crystals of semiconductor materials. The work on the content and formal levels considered the problem of improving the method and developed an automated system for the measurement of complex forms of deformation of semiconductor wafers and structures. The block diagram of an automated complex. Developed an algorithm and software. Product Description popup.authors Клюй Микола Іванович Когдась Максим Григорович Притчин Сергій Емільович popup.nrat_date 2020-04-02 Close