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Information × Registration Number 0214U001029, 0110U004656 , R & D reports Title Development of method and equipment for X-ray ultra-acoustic express multiparametric diagnostics of nanosystems. popup.stage_title Head Olikh Jaroslav Mykhaylovych, Registration Date 15-01-2014 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 A physical basis of the new combined techniques of X-ray nondestructive acoustic quantification and multiparameter diagnostic microdefects several types of single crystals was developed. The theoretical model uses a phenomenon unique sensitivity to performance defects as fully integrated dynamical diffraction intensity and the nature of its dependence on the diffraction conditions, ie the amplitude of the ultrasonic vibrations was created. Sensitivity and information content of these relationships amplified by combining targeted measurements in various other contexts diffraction. Quantitative diagnosis of complex defect structures in silicon crystals grown by the Czochralski method and irradiated by different doses of high-energy electrons (18 MeV) using the methods of high-resolution X-diffraction was performed. Using combination of reciprocal space map methodic and rocking curve analysis concentration and avarege radius of dislocation loops, as well as concentration and radii of oxygen precipitates in silicon samples were obtained. Product Description popup.authors Єфанов Олександр Миколайович Гудименко Олександр Йосипович Кладько Василь Петрович Кучук Андріан Володимирович МаксименкоЗоя Василівна Мачулін Володимир Федорович Проскуренко Наталія Миколаївна Сафрюк Надія Володимирівна Стадник Олександр Анатолійович popup.nrat_date 2020-04-02 Close