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Information × Registration Number 0214U001169, 0111U001941 , R & D reports Title Investigation of physical processes in low-temperature plasma of high-frequency and arc discharges with magnetic fields in gases and metal vapors popup.stage_title Head Borisenko Anatolii Hrygorovych, Registration Date 22-01-2014 Organization Institute For Nuclear Research Of National Academy Of Sciences Of Ukraine popup.description2 It is described the results of experimental investigations of characheristics and energetic ion spectra in the plasma of non-self-maintained arc discharge in the nickel vapor up to 35A current. The results for the energetic ion spectra indicate that in the plasma flows the ions are absent with energy having been exceeded than the discharge voltage. It is established that under the discharge current growth the mean energy of ions is decreased. It is shown that the discharge type allows to create the nickel plasma flows without the droplets. It is validated that the plasma flows have compensated volume discharge due to the flows may be used to film deposition as on the metal and semiconductor wafers and also on the dielectric wafers. The floating potentials are determined in created flows. The ionization coefficients are presented that indicate that the part of ion is increasing at current growth. The rate of deposition of nickel films are determined in dependence on discharge current. In vacuum the discharge may be used to create non-droplet and high-ionized metal plasma flows. Under letting-to-gas into the vacuum chamber the generation of gas-metal plasma is possible. The created plasma source may be used in micro- and nano-electonics and also in others industial applications. Product Description popup.authors Білодуб Анатолій Макарович Вірко Валерій Федорович Вірко Юрій Валерійович Войтенко Леонід Михайлович Костін Євген Григорович Літовко Ірина Валентинівна Подзірей Юрій Степанович Полозов Борис Павлович. Порицький Павло Віталійович Слободян В'ячеслав Михайлович Старчик Павло Денисович Федорович Олег Антонович popup.nrat_date 2020-04-02 Close