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Information × Registration Number 0214U001196, 0113U006117 , R & D reports Title Creation of technological station based on MOCVD D-180LDM installation for testing nanotechnologies for manufacturing semiconductor geteroepitaxial structures based on solid solutions А3В5 popup.stage_title Head Parfenyuk Pavel, Registration Date 23-01-2014 Organization Public Joint Stock Company "Scientific and Industrial Concern "Nauka" in the person of Lviv branch of Public Joint Stock Company "Scientific and Industrial Concern "Nauka" popup.description2 It is investigated optical and structural properties of two-mono-layer quantum points InAs/GaAs which has been grown up at different growth rates and temperatures of a surface. The basic technology factors which define optimum modes of crystallisation of quantum dimensional active area for SHF devices on the basis of system GaAs/AlGaAs by MOCVD epitaxy method on installation D-180LDM are defined. The technology of crystallisation of Bragg mirror on the basis of heterosteam GaAs/AlGaAs for optoelectronic heterostructures is developed and approved. The technology of crystallisation of quantum dimensional active area for the SHF devices on the basis of system GaAs/AlGaAs is developed and approved. The technology of crystallisation of nanoscale active areas GaAs/InAs/AlGaAs for optoelectronic heterostructures is developed and approved. Experimental samples of epitaxial heterostructures with Bragg mirrors, nanoscale active areas for optoelectronic devices and quantum dimensional active areas for SHF devices are made. The infrastructure of a technological site on the basis of installation MOCVD D-180LDM for testing nanotechnologies for formations of quantum dimensional and nanoscale objects which are applied to manufacture instrumental heteroepitaxial structures on the basis of firm solutions А3В5 is created. Product Description popup.authors Васильев Л.А. Горін А.В. Горін С.В. Горіна В.П. Доценко А.М. Завалішин В.О. Карпінський К.Б. Корчагін Ю.Д. Круковський С.І. Ляхова Н.М. Ляхова Н.О. Мержвинський А.О. Мержвинський П.А. Муричев Г.М. Олійник А.В. Ориховський Б.Г. Панна О.А. Парфенюк П.В. Пилатюк О.Є. Попов А.В Сипало О.О. popup.nrat_date 2020-04-02 Close
R & D report
Head: Parfenyuk Pavel. Creation of technological station based on MOCVD D-180LDM installation for testing nanotechnologies for manufacturing semiconductor geteroepitaxial structures based on solid solutions А3В5. (popup.stage: ). Public Joint Stock Company "Scientific and Industrial Concern "Nauka" in the person of Lviv branch of Public Joint Stock Company "Scientific and Industrial Concern "Nauka". № 0214U001196
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Updated: 2026-03-24