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Information × Registration Number 0214U002255, 0113U000224 , R & D reports Title Developments of novel mechanical and electrostatic nano-probe lithography and nano-manipulations techniques for nanoelectronisc and nanobiosensoric popup.stage_title Head Lytvyn Peter, Registration Date 27-01-2014 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 Theoretical approaches and models for predicting of the local electrochemical oxidation reactions and control of micro -and nano-relief of semiconductor chalcogenide films and can be used in scanning probe lithography. The technique for local nano-probe oxidation of silicon wafers was realized. Causes that can lead to uncontrolled destruction of the silicon surface and the probe in the contact zone, including uncontrollable electro deposition of probe metallization analyzed. Kinetics of changes in the surface profile of thin films of amorphous semiconductor chalcogenide glasses induced by electron beam and field of conducting AFM probe was determined. Realized direct formation of micro- and nano-features on the surfaces of chalcogenide films. Product Description popup.authors Єфремов О.О. Корчовий А.А. Литвин О.С. Литвин П.М. Прокопенко І.В. popup.nrat_date 2020-04-02 Close