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Information × Registration Number 0214U002554, 0113U003232 , R & D reports Title Nano-structural substrates of sapphire: obtaining and usage for producing AIN/sapphire popup.stage_title Head Vovk Elena Aleksandrovna, Registration Date 16-01-2014 Organization Institute for Single Crystals National Academy of Sciences of Ukraine popup.description2 The method of chemico-mechanical polish of sapphire substrates is improved. Obtained are sapphire substrates with nanostructured surface containing uniformly distributed terraces and steps with a width from 30 to 2000 nm. It is established that the surface relief of the nitride layer of the structure AIN/sapphire replicates the surface structure of the substrate distorted in the process of thermo-chemical etching. Product Description popup.authors Будніков Олександр Тимофійович Матейченко Павло Вікторович popup.nrat_date 2020-04-02 Close