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Information × Registration Number 0214U006702, 0110U004738 , R & D reports Title Development of the certificated mass-spectroscopy methods for nano-material, nano-srtuctures and amorphous alloy diagnostics popup.stage_title Head Romanyuk Borys Mikolayovich, Доктор фізико-математичних наук Registration Date 10-02-2014 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 The distribution of elements and impurities in multilayer periodic structures Mo / Si and supershallow p-n junctions were investigated by the methods of small angle X-ray diffraction, atomic- force microscopy and mass spectrometry of post-ionized neutral particles. Modeling of the diffraction spectra of multilayer structures and their comparison with the experimental results had been shown that the boundaries between phases formed silicides of molybdenum. Measurements of the thickness distribution of impurities confirme silicide layer formation on the boundaries between phases, oxides layers are found and their thickness is estimated. It is shown that the critical parameter which determines the resolution of the mass spectrometry of neutral particles method is the energy of the plasma ions when spraying samples. Optimal modes of the structure sputtering at the mass-spectrometric analysis, which provided a resolution of the method to a depth of better than 1 nm are proposed. It is shown that the resolution of this method is limited by the form and roughness of the crater bottom at ion sputtering and depends on the sputtering mode . A possible use of mono- and cluster ions of different signs is analised. It is possible to record not only atomic but also cluster ions, which allows to obtain information about the structure and types of chemical bonds of the object, expand the list of elements (components) that are registered and improve the sensitivity and depth resolution of mass-spectrometric analysis. The results of mass-spectrometric studies are in good agreement with the data of X-ray diffraction. The measurement of the thickness distribution of the element composition and thickness of the multilayer solid structures by mass spectrometry of secondary neutral particles are developed and sertified. Product Description popup.authors Мельник В.П. Мусаєв С.М. Оберемок О.С. Попов В.Г. Романюк Б.М. Хацевич І.М. popup.nrat_date 2020-04-02 Close