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Information × Registration Number 0214U008465, 0110U005776 , R & D reports Title The creation of X-ray diffracto-topograph-reflectometer for skew-antisymmetric geometry of diffraction with taking into account the diffuse scattering and profiled surface roughness, in particular, on grazing rays for nondestructive, selective in depth and multiprojection diagnosis of nanotechnology products popup.stage_title Head Kyslovskyy Ye.M., Registration Date 24-12-2014 Organization Institute for metal physics NAS Ukkraine popup.description2 The statistical dynamical theory of scattering in crystals with defects have been developed for skew-asymmetrical geometry in the case of slide rays, with account of the multiplicity effects of both bragg and diffuse scattering, and on the base of this theory the unique methods have been developed for skew-asymmetrical diagnostics of multiparametrical nanosystems and surface refflectometry. The developed methods provide the possibility of multiparametrical nondistructive quantitative and the depth selective with the nano-size step of scanning diagnostics of nohomogeneous complex structure of nanosystems. These methods provide the sensitivity to the pointwise defects with concentration from 10^(-6), all defects, each from these one gives contribution to the static Krivoglaz-Debye-Waller factor index of more than 10^(-3), and to Molodkin-Dederix coefficient of diffuse extinction more than 10^(-2) from the photoelectric absorption coefficient. Sensitivity to the atoms displacements due to defects is considered no worse than 10^(-6) nanometer. The methods, which would satisfy the complex of requirements, don't have any analogs in the world practice. Product Description popup.authors І.Е. Голентус І.М. Заболотний А.А. Катасонов А.О. Белоцька В.Б. Молодкін В.В. Лізунов В.Л. Маківська М.І. Дзюбленко О.В. Решетник О.С. Скакунова О.Ю. Гаєвський С.Й. Оліховський Т.П. Владімірова popup.nrat_date 2020-04-02 Close