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Information × Registration Number 0214U008550, 0113U006112 , R & D reports Title Development of nanotechnologies of molecular radial epitaxy and concentrated ionic beams for their use in the production of nanotechnology complex "NanoFAB" (the third stage) popup.stage_title Head Galstjan George, Registration Date 19-06-2014 Organization Public Joint-stock Company "Scientific and industrial concern "Nauka" popup.description2 Optimisation of system of active vibro-protection of the scanning probe microscopy module is held taking into account additional installed modules. The working project of infrastructure is developed for maintenance of functioning of the molecular beam epitaxy (MBE) module (systems of maintenance of necessary climate conditions and vibro-protection, etc.) as a part of nanotechnological complex "NanoFab-100". Functional chart of MBE module of nanotechnological complex "NanoFab" is developed. Key parametres of vacuum system of MBE module are calculated and the outline design documentation is developed taking into account presence of auxiliary chambers (except the basic chamber of epitaxial growth). Tests and calibration of the scanning probe microscopy (SPM) module are conducted using contact techniques of atomic power microscopy (АPМ) and scanning tunnel microscopy (SТМ) which have shown that the system completely provides necessary operating conditions as for module SPM and in a whole concerning vibration levels in a frequency range from 1 to 1000 Hz. The method of transportation of samples is developed for maintenance of movement of technological plates between module MBE and chambers of nanotechnological complex "Nanofab-100" without complex depressurization through module SPM. Also the alternative method of samples loading through the preparation chamber is developed. The infrastructure for MBE module is realised with some improvements. Product Description popup.authors Євсюков А.М. Анікеєв В.В. Бонковський Е.Л. Ваків О.В. Ворона С.П. Галстян Г.Г. Глуховська Ю.Ю. Голуб В.В. Гуренко В.О. Джежеря Ю.І. Журавльов Б.Х. Клименко Л.П. Котовський В.Й. Лєпєєва Ю.В. Лаунець В.Л. Лобода З.В. Лукін П.В. Луценко Г.В. Мартинюк І.Д. Мовчан Д.М. Райгородецька Ю.Г. Скоблік О.П. Сухов М.Є. Філатов С.А. Філатова В.С. Хабаєв П.В. Хмилєвська О.В. Юріліна Н.А. popup.nrat_date 2020-04-02 Close