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Information × Registration Number 0215U001367, 0112U005924 , R & D reports Title Development of the complex methods and model samples for the treatment of the functional depositions by beams with high power consumption popup.stage_title Head Tseluyko Olexandr Fedorovich, Registration Date 16-02-2015 Organization Kharkov National University named after V.N. Karazin popup.description2 The investigation object is a focused circular ion beam, electron and ion beams in the subsurface layers of the space charge, the radiation intensity in the range of extreme ultraviolet light. The project aim is development of forming and processing methods of the functional depositions on the micro and nano level using electron and ion beams with high power density. The research method is measurement of external and internal parameters of the beam, plasma-beam systems and gas discharges; measurement of radiation in the extreme ultraviolet range. New materials and technologies constantly require the development and implementation of new processing methods of solid surface. Devices were developed in the work are based on a fundamentally new methods of magneto-ballistic focusing of circular ion beams in the Hall ion sources; charge and current compensation of circular ion beam under low pressure; subsurface formation of low-energy intense ion fluxes, including the use of thermionic plasma; the intense radiation formation in the extreme ultraviolet range. It has been shown the construction of a focused ion beam source with a high power density for surface polishing with nanometer precision; systems with subsurface formation of dense low-energy ion beams for processing materials without radiation damage; the source of intense radiation in the extreme ultraviolet range to activate the surface and increase films adhesion properties. Hall ion source with a magneto-ballistic focusing of the beam and the surface polishing technology with nanometer precision corresponds to modern international standards. System with subsurface acceleration of ion fluxes has significant advantages over similar products and allows carrying out technology processes more effective. The created model of directional radiation pulsed source in the extreme ultraviolet range has no analogues. Results of research report were introduced at the physics and technology department of V.N. Karazin Kharkiv national university and at the Institute of plasma physics KIPT. Product Description popup.authors Бізюков І. Бізюков О. Гірка О. Рябчиков Д. Середа І. Целуйко О. popup.nrat_date 2020-04-02 Close