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Information × Registration Number 0215U006007, 0111U008998 , R & D reports Title Research of processes plasma chemistry and chtmical vapor deposition restoration metaine connections in the environment of active and inert gases. Synthesis and division of fluorides of metals and their connections. popup.stage_title Head Shirokov Boris Mikhajlovich, Доктор технічних наук Registration Date 21-01-2015 Organization National Science Center "Kharkiv Institute of Physics and Technology popup.description2 Investigations aimed at hydrogen reduction of silicon tetrachloride in the low-temperature nonequilibrium plasma high-frequency induction discharge were carried out. Matching the load to the generator was carried out on the basis of the method of cylindrical equivalent tape. The range of parameters of stable excitation of high-frequency discharge in the vapor - gas mixture H2 + SiCl4 were identified. By using probe methods the temperature and density of electrons were determined, investigated the distribution function of the electron velocity. Spectrographically investigated conditions for the creation of atomic hydrogen from the Doppler broadening of the spectral lines Hа, Hв. On the composition of the plasma and the energy characteristics of charged particles the main direction of chemical reactions in the discharge was determined. Product Description popup.authors Бакай Катерина Сергеевна Глушко Павло Іванович Дериземля Анатолій Миколайович Евсюков О.І. Журавльов Олександр Юрьевич Зуєва Татьяна Миколаевна Капустін Віталій Леонідович Крохмаль Сергей Олександрович Мартиненко Віктор Григорович Осипов Олександр Давидович Патокін Олександр Петрович Пелипець Юрий Олександрович Радченко Володимир Іванович Семенов Микола Олександрович Стригуновський Сергей Олександрович Суща Аліна Анатольевна Хованський Микола Олександрович Широков Борис Михайлович Шиян Олександр Васильович Щербакова Валентина Володимирівна popup.nrat_date 2020-04-02 Close