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Registration Number

0215U006033, 0113U001080 , R & D reports

Title

Development of technologies forming ion-plasma coatings based on nanostructured oxides and nitrides of transition metals group

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Head

Farenyk Volodymyr Ivanovich,

Registration Date

26-01-2015

Organization

Kharkov National University named after V.N. Karazin

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Objective: Investigation of processes of reactive ion-plasma synthesis of nanocomposite structures from combined flows of charged and reactive particles and development on the basis of a new generation technologies of synthesis of multi-functional (including nanocomposite) coatings and structures for the needs of nanoelectronics, biomedicine, nuclear energy and engineering. Method of research: measurement of parameters of magnetron and high-voltage EH discharge, study of the surface structure and physical properties of the synthesized coatings. The report presents the results of development of new technologies for the synthesis of complex composite ceramic coatings and structures using multifunctional cluster ion-plasma system. In particular, deposition of double-layer coatings AlN/Al2O3 and complex composite ZrON oxinitride coatings by reactive magnetron synthesis have been studied. Also the technology of synthesis of thin films of fluorescent material ZnWO4 and bioactive hydroxyapatite Ca10(PO4)6(OH)2 using physical sputtering of complex composite targets by an ion source of "Radical" type was perfected. Basing on the research results improvement of multifunctional cluster ion-plasma system has been carried out, and high quality coatings ZrAlOx have been synthesized.

Product Description

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Дахов О.
Дудін С.
Зиков О.
Лісовський В.
Плетньов В.
Фареник В.
Юнаков М.
Яковін .

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2020-04-02