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Information × Registration Number 0216U000607, 0112U008358 , R & D reports Title Creation of semiconduktor layers on non mon oriented and developed surface substrates by vacuum-thermail evaporation and annealing popup.stage_title Head Baganov Yevgen Aleksandrovich, Registration Date 10-02-2016 Organization Kherson national technical university popup.description2 The technological tool set for realization of thermal sputtering of amorphous layers and their following annealing is worked out. Conducted experimental investigations show the suggested mathematical model of the processes is correct. The computer program, based on worked out mathematical model, is realized for calculations of technological conditions that provides obtaining of polycrystalline layers with given parameters. Product Description popup.authors Томілова Владислава Владиславівна popup.nrat_date 2020-04-02 Close