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Information × Registration Number 0216U001193, 0115U001364 , R & D reports Title Development and research of a new type of plasma source for uniform processing of large surfaces on the basis of the helicon discharge with a linear excitation system popup.stage_title Head Virko Valerij Fedorovich, Registration Date 27-01-2016 Organization Institute For Nuclear Research Of National Academy Of Sciences Of Ukraine popup.description2 The investigations of plasma density distribution in modified helicon plasma discharge with linear excitation system were continued. The distributions of ion current to the collector which was partitioned designed to simulate the work surface were measured. The study modes extended to non-resonant excitation discharge in circumstances where the distance between the antenna and the workpiece is less than the length of standing helicon waves in the direction of the magnetic field. It is found that the case of sufficient uniform plasma density along the antenna can be realized only in the magnetic field of certain intensity. In excess of optimum magnetic field the plasma density distribution becomes unstable and focuses on one end of the antenna, while on the other side plasma density sharply decreases. In these conditions with increasing of RF power the population of hot electrons is observed that manifests in the growing of negative floating potential. It was shown that such reallocation of plasma density initiates by electrostatic component of antenna and plasma coupling. Distribution of high-frequency magnetic field along the antenna (Bz) shows signs of standing wave that extends perpendicular to the external magnetic field B0. Unlike Helicons the length of these waves decreases with increasing magnetic field and is independent from plasma concentration. It is assumed that connection with the plasma density distribution of wave processes is possible. Product Description popup.authors Вірко Юрій Валерійович Слободян В'ячеслав Михайлович popup.nrat_date 2020-04-02 Close