Registration Number
0216U002891,
0116U002856
, R & D reports
Title
Development of technology for production of sensor chips with increased sensitivity and improved physical - mechanical characteristics of for the optical sensors based on surface plasmon resonance (SPR)
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Head
Indutnyi Ivan, Доктор фізико-математичних наук
Registration Date
22-12-2016
Organization
V.Laskaryov Institute of Semiconductor Physics NAS of Ukraine
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The technology of manufacture of nanostructured sensor chips with high sensitivity and improved physical - mechanical properties with the period from 0.28 to 0.9 microns and the depth of the relief 10 to 50 nm has been developed. The experimental batch of nanostructured chips were manufactured and their morphological, optical and sensory properties were investigated. It is found that the multiplicity of increasing the sensitivity of the refractometer and the value of the interval of the refractive index of the medium, in which this increase occurs, depends on the depth of the relief of the grating structure on the chip surface.
Product Description
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Данько Віктор Андрійович
Жовмір Сергій Сергійович
Корчовий Андрій Адамович
Литвин Петро Мр'янович
Луканюк Марія Василівнв
Ляпін Олег Миколайович
Минько Віктор Іванович
Михайловська Катерина Василівна
Прокопенко Ігор Васильович
Сопінський Микола Вікторович
Ушенін Юрій Валентинович
Христосенко Роман Васильович
Шепелявий Петро Євгенович
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2020-04-02
