Registration Number
0216U009008,
0116U006013
, R & D reports
Title
Ordered nanostructures on silicon surfsce for figh efficient photovoltaic cells
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Head
Evtukh Anatoliy Antonovych,
Registration Date
05-09-2016
Organization
Institute of Semiconductor Physics of National Academy of Sciences of Ukrain
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The report is submitted in one volume and contains 48 pages, including figures 14, tables 0, references 26. Keywords: micro- and nanostructured surfaces, silicon nanowires, metal catalytic chemical etching, chemical etching. Aim: To develop the technologies formation of silicon nanowires and silicon composite structures pyramids - silicon nanowires on a silicon surface by chemical etching (anisotropic and metal - catalytic chemical etching). As a result of this stage the for formation of silicon nanowires and combined silicon structures pyramids - silicon nanowires on a silicon surface by chemical etching (anisotropic metal and catalytic chemical etching) have been developed. It is shown that the method of nonelectrolytic chemical etching (MacEtch) can be regarded as an effective and relatively inexpensive way for texture of the silicon substrate surface. This method allows to obtain structures with different morphology and distribution on the surface of the substrate. In particular, the whisker arrays of Si nanocrystals with diameters of the order of 250 nm and length of 5 microns and 10 microns have been obtained by metal catalytic chemical etching MacEtch. This shows the possibility of obtaining of the regular nanowhiskers by the nanosphere lithography using the colloidal silica nanospheres that serve as a mask during the deposition of the metal catalyst by thermal evaporation. Selecting the optimal concentration of etchant, you can change the diameter of the nanospheres and thus get the nanowhiskers of desired diameter.
Product Description
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Євтух Анатолій Антонович
Братусь Олег Леонідович
Парфенюк Павло Васильович
Чудовська Галина Вікторівна
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2020-04-02