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Information × Registration Number 0217U001135, 0116U006956 , R & D reports Title Development of methods for determining the refractive index of diamond-like films and evaluation of internal stress level popup.stage_title Head Volodymyr Maslov, Registration Date 24-01-2017 Organization Institute of Semiconductor Physics popup.description2 Research report "Development of methods for determining the refractive index of diamond-like films and evaluation of internal stress level": 28 pages, 14 pictures, 13 references. Grounds for the research. Project "Development of methods for determining the refractive index of diamond-like films and evaluation of internal stress level" is performed under the contract from 26.07.2016 of №245. The purpose of work in accordance with the Technical task: the development of methods for determining the refractive index of the diamond-like films. Methods of research - scientific methods, methods of spectral analysis, methods of systematic and comparative analysis. Based on these studies were: 1. The possibility of determining the optical refractive index of the carbon-containing and diamond-like nanofilms on a glass substrate by surface plasmon resonance and via modulation-polarization technique. 2. Experimentally investigated and determined that the samples sent to the Customer 632b and 632v refractive index was 2,508 ± 0,005 RIU, and 631b on the sample - was 2,684 ± 0,005 RIU. 3. IR spectrometer investigated thin films and diamond-like carbon layers on silicon substrates by the scheme of reflection of infrared radiation. It is shown that nanolayers, the thickness of 50-150 nm have no effect on the optical properties, but their high mechanical strength and hardness make it possible to use these nanolayers as protection for the optical elements of optoelectronic devices. 4. The polarization method and X-ray methods for determining the non-destructive methods of internal stresses in the layers of diamond-like carbon-containing and Nanofilms offered. Since mechanical stress significantly increases during the transition from small to large samples, it is advisable to continue the research in this direction on the samples with a diameter of 100 to 300 mm with the addition of comparison samples, which are manufactured in one manufacturing process in the same chamber with the samples provided by the customer from the industry . 5. On the new technical solution has been sending in the Ukrainian patent (Optical diamond-like coating, the application of 11.09.2016 № u201611362). Product Description popup.authors Андросюк Галина Миколаївна Венгер Євген Федорович Дворніченко Микола Михайлович Дорожинський Гліб Вячеславович Качур Наталія Володимирівна Кудрявцев Олександр Олексійович Кушнір Ганна Василівна Литвин Петро Мар'янович Маслов Володимир Петрович Мороженко Василь Олександрович Стеценко Максим Олександрович popup.nrat_date 2020-04-02 Close