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Information × Registration Number 0217U001691, 0112U002094 , R & D reports Title To investigate mechanisms of formation of the nanostructure and its effect on the properties of the superhard magnetron coatings and semiconductor plasmochemical films popup.stage_title Head Ivashchenko Volodymyr, Доктор фізико-математичних наук Registration Date 24-03-2017 Organization Frantzevich Insitute for Materials Science Problems of the Ukranian National Academy of Sciences popup.description2 The objects of research are superhard coatings and semiconductor films based on NbN, NbC, SiNx SiC, SiCN, AlN, their structural, mechanical and optoelectronic properties. Purpose of the work is to study the mechanisms of formation of nanostructures and its influence on the structural, mechanical and optoelectronic properties of films based on these refractory compounds. It was synthesized and studied the such magnetron nanocomposites coatings as: Nb-Si-N , Nb-Al-N , Nb-Si-C coating , the nanolayer TiN / SiC coating and AlN / BNC coating ; magnetron Si-C-N films , the plasmachemical Si-C-N films (. The optimal regimes of deposition of the coatings and films were found. In particular, it was found that the nanohardness and Knoop hardness of nanostructured coatings reaches 35-40 GPa and over 56 GPa , respectively. The nanohardness of the Si-C-N films is more than 36 GPa. This film is a semiconductor with an energy gap is within 2.1-2.4 eV. Based on the first principle calculations it was suggested the systems Al-Mg-B, Ti-Si-C as the materials for the coating . The structural models of interfaces in the nanocomposite and nanolayer coatings were suggested. The results of studies show that the magnetron films can be used as a wear resistant and protective coatings. Due to the optoelectronic properties, high hardness and low friction coefficient, amorphous Si-C-N films can be recommended for use in semiconductor devices and micro electro mechanical systems (MEMS). Product Description popup.authors Є.Я. Тельніков Є.Я. І. І. Тімофєєва А. В. Осадча А. М. Ковальченко А.О. Козак В. І. Шевченко В. М. Гранько Л. А. Іващенко М. А. Васильківська О. І. Биков О. І. Оліфан О. К. Марчук О. К. Порада О. О. Онопрієнко О. О. Ситіков П. Л. Скринський С. В. Гуменюк С. Ф. Корічєв Т. М. Павлиго popup.nrat_date 2020-04-02 Close