Search academic texts

Information × Registration Number 0217U002147, 0115U003871 , R & D reports Title The new plasma-optycal system for the dense metal plasma filtering from microparticles - the development of a filter for dense plasma filtering popup.stage_title Head Strel'nitskij Vladimir Evgenievich, Доктор фізико-математичних наук Registration Date 23-01-2017 Organization National Science Center "Kharkiv Institute of Physics and Technology popup.description2 Report: 77 p., 40 fig., 38 references. .Macroparticles, surely present within arc plasma are severely worsening the quality of deposited coatings. Getting rid of macroparticles by means of plasma separation is accompanied with the significant decrease of deposition rate. In order to decrease macroparticles negative impact on depositing film and to increase deposition rate, an energetic effect of high-energy electron beam on macroparticle vaporization was investigated. These electrons are self-consistently emerging inside cylinder channel of plasma-optic system with crossed magnetic and electric fields. High-energy electrons are emerging near inner wall of cylindrical surface as a result of secondary ion-electron emission. An additional energy pumping to arc plasma stream by self-consistently emerging radially directed beam of high-energy electrons is investigated in this work. It was shown, that the energy being pumped to the system is sufficient to evaporate macroparticles. Created software-hardware complex, which consists of modernized multichannel probe and written software for its functioning, allows one to optimize transporting capabilities of filters and to adjust spatial distribution of plasma ion component in a real-time mode. Investigation results one to deposit multicomponent films with thickness and composition uniformity on a large (as compared to known methods) areas using twochannel filters with a specific distribution of magnetic field. Said result is achieved by mixing plasma streams from two cathodes with a simpler then obtained coating composition. Product Description popup.authors Аксьонов Іван Івановіч Аксьонов Дмитро Сергійович Маслов Василь Іванович Стрельницький Володимир Євгенійович popup.nrat_date 2020-04-02 Close