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Information × Registration Number 0217U002994, 0114U000377 , R & D reports Title Metrological setup development and producing for nanoelectronic components diagnostic basing on scanning probe microscopy techniques popup.stage_title Head Igor Prokopenko, Registration Date 28-12-2017 Organization V.Lashkaryov Institute of Semiconductor Physics Nasional Academy of Science of Ukraine popup.description2 For the diagnosis of new materials, a metrological complex was developed and created, with the means of which it is possible to carry out three-dimensional micro- / nanotopometry of reliefs, diagnostics of local nanomechanical, electrical, leophilic and bioadhesive properties of mineral and organic surfaces under room conditions and in liquids. Product Description popup.authors Корчовий А.А. Литвин П.М. Прокопенко І.В. popup.nrat_date 2020-04-02 Close