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Information × Registration Number 0218U006016, 0117U007604 , R & D reports Title Study of diffusion of phosphorus into silicon from pyrophosphate zirconium sources popup.stage_title Head Ostrovskii Ihor Petrovych, Registration Date 06-03-2018 Organization Lviv Polytechnic National University popup.description2 Experimental samples were made and diffusion of phosphorus in silicon from sources containing zirconium pyrophosphate for doping in technological processes of manufacture of semiconductor devices was investigated5481 Product Description popup.authors Богдановський Юрій Миколайович Качан Степан Іванович Мищишин Володимир Михайлович Нічкало Степан Ігорович Ховерко Юрій Миколацович popup.nrat_date 2020-04-02 Close