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Information × Registration Number 0218U006131, 0115U002772 , R & D reports Title Construction of the Facility for X-ray Optics Units Production with Proton Lithography. popup.stage_title Head Voznyi Vitalii, Registration Date 23-03-2018 Organization Applied Physics Institute NAS of Ukraine popup.description2 An apparatus was developed for obtaining multilayer X-ray mirrors and diffraction gratings for X-ray microscopy in the wavelength range 1 nm. The magnetron arrangement VUP-5M was upgraded to increase the power of magnetrons and increase the working area of the spraying surface. Control films of copper and carbon are obtained under various operating conditions of the magnetron arrangement and various pressures of the working gas of argon. Element composition, thickness and homogeneity of Cu and C films on a single-crystal silicon and sitall substrate were determined by PIXE and RBS. The substrates for phase diffraction gratings are prepared: single-crystal silicon with a two-layer coating of Cu/Ti obtained by magnetron sputtering with a photoresist PMMA applied to their surface. Targets with photoresist PMMA were irradiated on the channel of a nuclear scanning microprobe; irradiated regions were etched and the surface of samples was examined by scanning electron microscopy. Product Description popup.authors Возний Віталій Іванович Колінько Сергій Володимирович Коломієць Володимир Миколайович Кононенко Ірина Миколаївна Кравченко Сергій Миколайович Марченко Андрій Миколайович Пономарьов Олександр Григорович Ребров Володимир Анатолійович Саливон Вадим Феліксович popup.nrat_date 2020-04-02 Close