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Information × Registration Number 0218U006135, 0117U003360 , R & D reports Title Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources. popup.stage_title Head Mordyk Serhiy, Registration Date 23-03-2018 Organization Applied Physics Institute NAS of Ukraine popup.description2 Impact of non-uniformity of a magnet field upon a helicon plasma source is studied on the basis of a self-consistent two-fluid model. Microwave interferometer is upgraded. In the designed ICP AES LP device with a magnet field of the proposed configuration based on a permanent magnet system, the ion emission prevails over the atomic one. Product Description popup.authors Іванюк Віктор Кузьмич Алексенко Олег Володимирович Бугай Олександр Миколайович Булат Володимир Борисович Мордик Сергій Миколайович popup.nrat_date 2020-04-02 Close
R & D report
Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources.
Head: Mordyk Serhiy. Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources.. (popup.stage: ). Applied Physics Institute NAS of Ukraine. № 0218U006135
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Updated: 2026-03-22


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