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0218U006135,
0117U003360
,
Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources.
Mordyk Serhiy,
23-03-2018
Applied Physics Institute NAS of Ukraine
Impact of non-uniformity of a magnet field upon a helicon plasma source is studied on the basis of a self-consistent two-fluid model. Microwave interferometer is upgraded. In the designed ICP AES LP device with a magnet field of the proposed configuration based on a permanent magnet system, the ion emission prevails over the atomic one.
Іванюк Віктор Кузьмич
Алексенко Олег Володимирович
Бугай Олександр Миколайович
Булат Володимир Борисович
Мордик Сергій Миколайович
2020-04-02
Updated: 2025-12-07
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