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Information × Registration Number 0219U000086, 0118U006101 , R & D reports Title Creation of the setup for research of new functional nanomaterials popup.stage_title Head Vasin Andrii Volodymyrovych, Registration Date 11-01-2019 Organization Institute of Semiconductor Physics popup.description2 The technical documentation of a modified system of depositing thin films by magnetron sputtering with the ability to control the configuration of the magnetic field during deposition, and using a movable substrate holder for increasing of uniformity of the film on the substrate, the mechanism of the movement of the substrates over the magnetron and the power supply unit for the magnetron, is fabricated. Product Description popup.authors Русавський Андрій Вадимович Стєпанов Володимир Григорович popup.nrat_date 2020-04-02 Close