Registration Number
0219U100597,
0117U004875
, R & D reports
Title
The technology of forming the vacuum-plasma structural components for nanoelectronics
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Head
Bazhyn Anatolij I., Доктор фізико-математичних наук
Registration Date
20-02-2019
Organization
Scientific Center of Physical Technologies
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Obtained samples of nanostructured elements, in particular on the basis of carbon nanotubes. The physical and technological characteristics of the nanosized elements obtained are determined. The optimum technological parameters of formation of nanostructures are determined. Recommendations on the technology of formation of nanostructured elements are developed.
Product Description
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2020-04-02
