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Information × Registration Number 0220U100413, 0118U000271 , R & D reports Title Two-dimensional periodic silicon nanostructures for MEMS-compatible integrated microconverters popup.stage_title Head Yerokhov Valerii Yu., Доктор технічних наук Registration Date 17-01-2020 Organization Lviv Polytechnic National University popup.description2 Developed concepts of MEMS-compatible integrated microconverters based on polycrystalline and filamentary silicon and porous micro- and nanostructures Si, Ge will provide the creation of a special (2D) two-dimensional silicon structure and its monolithic integration with functional devices, which will allow the manufacture of electromechanical systems, which have no domestic analogs.  Product Description popup.authors Budjak Yaroslav S. Druzhinin Anatolii O. Lukianchenko Anton I. Liakh- Kaguy Natalia S. Mashchushun Vlodumur M. Nichkalo Stepan I. Ostrovskii Ihor P. Temirova Olena H. Khoverko Yriy M. Chekajlo Mukhajlo V. Shcherban Natalia O. popup.nrat_date 2020-04-02 Close