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Information × Registration Number 0220U100474, 0119U102210 , R & D reports Title The technology of rozbuknya vacuum surfaces by the high-frequency plasma rozryad in kombіnatsії z rozryadom postіynogo strumu. popup.stage_title Head Moiseienko Volodymyr Ye., Кандидат фізико-математичних наук Registration Date 20-01-2020 Organization National Science Center "Kharkiv Institute of Physics and Technology" popup.description2 Plasma DSM-1 experiments were carried out to determine the vacuum-plasma characteristics (mainly erosion and gas velocity in vacuum) of stainless steel before and after cleaning the walls of the vacuum chamber by means of glow discharge (LR) and combined glow-microwave). in an argon atmosphere. Volt-ampere characteristics, electron density (ne ~ 5108 cm -3 for both modes) and electron temperature (Te10 eV for LC mode and 50 eV for LC mode) were measured. It was shown that the anode discharge voltage in the combined LC mode is much lower (with the same electrode currents) than in the glow discharge. In some modes, this voltage reduction can be up to 200 V. The erosion rate of 12X18H10T stainless steel was measured by the weight loss method. It has been shown that the erosion in the combined discharges is substantially, by about 70%, less than in the gill discharges. Regarding the cleaning of the walls of the vacuum chamber from contamination, the measurements were carried out at the expense of the rate of gassing of stainless steel 12X18H10T with an in situ thermosetting probe in the DSM-1 vacuum chamber. It has been shown that cleaning the walls of the vacuum chamber with a glow discharge for 6 hours results in a reduction in the rate of gas evolution by about five times. When the wall of the chamber was treated with a LC discharge, starting from almost the same initial conditions (the anode discharge current is the same), the gas emission rate decreased even more - 15 times. Spectral measurements of the glow plasma and combined discharges were performed. The analysis of the spectra shows a decrease in the ratio of the peaks of argon and neutrals during the transition from the glow discharge to the combined one. Product Description popup.authors GLAZUNOV Gennady P. DREVAL Mykola B. Zamanov Nikolay V. KOVTUN Yuriy V. KOZULYA Mykhaylo M. KONOVALOV Vladimir G. KOROVIN Valeriy B. Kramsky Yegor D. KRASYUK Oleksandr Yu. KULIK Yulia S. LYSTOPAD Viktor M. LOZIN Oleksiy Vasylovych Maznichenko Sergey M. Moiseenko Volodymyr E. OZHERELEV Fyodor I. Pavlichenko Rostislav O. SUSKO Yevhen V. Tarasov Igor K. popup.nrat_date 2020-04-02 Close
R & D report
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Head: Moiseienko Volodymyr Ye.. The technology of rozbuknya vacuum surfaces by the high-frequency plasma rozryad in kombіnatsії z rozryadom postіynogo strumu.. (popup.stage: ). National Science Center "Kharkiv Institute of Physics and Technology". № 0220U100474
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Updated: 2026-03-23