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Information × Registration Number 0220U101128, 0117U004855 , R & D reports Title The physical principles of ion-plasma synthesis and control of the properties of nanostructured complex-composite coatings popup.stage_title Head Lisovskiy Valeriy O., Доктор фізико-математичних наук Registration Date 03-02-2020 Organization V.N. Karazin Kharkiv National University popup.description2  A new combined Magnetron-Ion Source Sputtering System (MISSS) has been developed and manufactured, which includes a planar magnetron and a Hall-type ion source with a common magnetic system. The system provides independent control of ion energies in the range 10-1000 eV and ion current density 0.1-10 mA/cm2, bombarding the growing film with a deposition rate of up to 3 nm/s at gas pressure 0.5-5 mTorr without significant restrictions on the gas type. Coatings of tantalum oxide and diboride were synthesized using CIPS and MISSS systems. Physical and mechanical properties (microhardness, Young's modulus, and adhesive strength) of these films in amorphous, amorphous-crystalline and nanocrystalline states are investigated, and optimal energy conditions for the film formation with the best physical-mechanical properties are determined. The relationship between the non-equilibrium heating of the surface of the synthesized coating with the microstructure and physical properties of the condensate is established, and based on this, the principles of purposeful management of the structure and properties of the coatings are developed. For the conditions of magnetron deposition of Al2O3 coatings with additional ion bombardment, an energy-structural diagram of α- and γ-phase synthesis was constructed. Product Description popup.authors Yefymenko Nina O. Dakhov Oleksandr M. Dudin Stanislav V. Zykov Oleksandr V. Lisovskyi Valerii O. Yunakov Mykola M. Yakovin Stanislav D. popup.nrat_date 2020-04-02 Close