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Information × Registration Number 0220U101253, 0119U101491 , R & D reports Title Creation and testing of modified magnetron for deposition of new functional nanomaterials popup.stage_title Head Vasyn Andrii V., Доктор фізико-математичних наук Registration Date 07-02-2020 Organization V. Lashkaryov Institute of semiconductor physics popup.description2  The general concept of a magnetron device with an unbalanced magnetic field and the corresponding technical documentation were developed. A cathode assembly was made, which included the main magnetic system of three samarium-cobalt ring magnets with a diameter of 55 mm and a central magnet with a diameter of 15 mm with a system of running distilled water. The diameter of the target that can be mounted on the cathode is 60 mm. An external (unbalancing) magnetic system with corresponding movement mechanisms was also made. Tests have shown that the magnetron's magnetic system provides a plasma discharge with the geometry characteristic of the "highly unbalanced magnetron" regime, which was the main goal of this project. Product Description popup.authors Kysil Dmytro V. Rusavsky Andrij Vadimovich Stepanov Volodymyr H. popup.nrat_date 2020-04-02 Close