1 documents found
Registration Number

0220U101847, 0119U102869 , R & D reports

Title

Construction of a magnetron to evaporate the metals and of a mechanism to disbalance its magnet field on a basis of permanent magnets

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Head

Lopatkin Roman Yu., Кандидат фізико-математичних наук

Registration Date

26-02-2020

Organization

Institute of Applied Physics, NAS of Ukraine

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Produced equipment was set on VUP5 V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine. It were tested vacuum impermeability, parameters of discharge ignition and another parameters accordingly to technical assignment.

Product Description

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Varakin Oleg V.
Lopatkin Roman Yu.
Pavlenko Yurii A.
Chuzhov Igor G.
Shkurat Oleksandr I.

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2020-04-02

R & D report
Construction of a magnetron to evaporate the metals and of a mechanism to disbalance its magnet field on a basis of permanent magnets
Head: Lopatkin Roman Yu.. Construction of a magnetron to evaporate the metals and of a mechanism to disbalance its magnet field on a basis of permanent magnets. (popup.stage: ). Institute of Applied Physics, NAS of Ukraine. № 0220U101847
1 documents found

Updated: 2025-05-13


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